Films Deposited from Reactive Sputtering of Aluminum Acetylacetonate Under Low Energy Ion Bombardment
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Materials Research
سال: 2017
ISSN: 1980-5373,1516-1439
DOI: 10.1590/1980-5373-mr-2016-0647